Open Access
Research Article·pp. 431–447·Vol. 26, Issue 3Apr 2023
Dynamic modelling and analysis of MEMS-based low-pressure range capacitive sensors for biomedical applications
Suman, Deepak Bhatia
Published Online: 01 Apr 2023DOI: 10.47974/JIM-1673
In this paper: Sensitivity and linearity are promising parameters for MEMS (Microelectromechanical system) based Capacitive pressure sensors (CPS). This study discusses the basic principle, classification of the sen...
